China's ultra precision optical component processing technology has entered the world's leading ranks

The reporter learned from the University of National Defense Technology that the new generation of ultra precision optical component processing equipment independently developed by the School of Mechanical and Electrical Engineering and Automation of the university has recently passed the process assessment organized by relevant units. The results show that the processing accuracy of the equipment has achieved a significant breakthrough at the sub nanometer level, and the RMS (root mean square) value of the optical part surface accuracy of the typical test piece has reached 0.361 nanometers, marking that China's ultra precision optical part processing technology has entered the world's leading ranks.

Ultra precision machining technology is a key bottleneck technology in advanced equipment manufacturing, and nano precision is known as the "pearl on the crown" of ultra precision machining technology. In the past, due to the backwardness of optical component processing technology in China, it was impossible to process optical components with large diameters, high precision, and complex surface shapes, which seriously restricted the technological progress in related fields. Since the 1980s, the precision engineering innovation team of the school, led by Professor Li Shengyi, has made more than 30 years of tenacious efforts and independent innovation. They have successively broken through core key technologies such as high-precision machine tool precision motion mechanism design, efficient magneto rheological polishing fluid preparation, ion beam stability control, and sub nanometer full frequency band error control of optical components. They have developed a series of magneto rheological and ion beam polishing equipment with independent intellectual property rights, breaking the technological blockade of developed countries on ultra precision machining equipment, and making China the country that has comprehensively mastered the two high-precision optical component processing technologies of magneto rheological and ion beam polishing equipment, following the United States and Germany.

In recent years, the precision engineering innovation team of the university has successfully developed a new generation of ion beam polishing machine and CNC smoothing polishing machine with the support of the National Major Science and Technology Special Project Phase II of "Large scale Integrated Circuit Manufacturing Equipment and Complete Process" and the National Natural Science Foundation of China. The minimum controllable material removal amount reaches 0.1 nanometers. Experts point out that this independent innovation achievement can provide strong technical support and equipment support for national major scientific and technological projects such as "large-scale integrated circuit manufacturing equipment and complete processes" and "high-resolution Earth observation systems". It will directly promote key technological breakthroughs in related fields and is of great significance for improving China's advanced equipment manufacturing level.